Vertical Cavity Optical Switch and Optical Modulator

Using the enhancement effect of the vertical cavity on the optical nonlinearity, we fabricated a vertical cavity photon switch based on a cylindrical structure. An optical switch with a switching speed of 20 picoseconds and a switching energy consumption of 1 femtoJoule/square micron was realized. This optical modulation device can be applied to high-speed low-power optical networks. At the process level, we have realized a micropillar structure with extremely high steepness, with an etching depth of 10 microns and a horizontal resolution of less than 200 nanometers.